Measurement system, processing system, measurement method, and processing method

A measurement system comprising:

• a first measurement apparatus that is configured to apply measurement light to a measurement member attached to a movable part of a processing apparatus configured to process a processing target, and that is configured to measure a position of the measurement member;
• and
• a measurement control apparatus that is configured to control the first measurement apparatus, wherein
• the measurement control apparatus includes:
• an arithmetic unit that calculates a position of a tool center point of the processing apparatus, based on the position of the measurement member measured by the first measurement apparatus using the measurement light applied to the measurement member and position transformation information;
• a transmission unit that transmits first position information indicating the position of the tool center point, to a processing control apparatus configured to control a movement of the movable part, and
• the arithmetic unit calculates the position transformation information, based on the position of the measurement member measured by the first measurement apparatus using the measurement light applied to the measurement member in a first state in which the tool center point is located at a predetermined position.

A measurement method in a measurement system including:

• a first measurement apparatus that is configured to apply measurement light to a measurement member attached to a movable part of a processing apparatus configured to process a processing target, and that is configured to measure a position of the measurement member:
• and a measurement control apparatus that is configured to control the first measurement apparatus,
• the measurement method comprising:
• the measurement control apparatus transforming the position of the measurement member measured by the first measurement apparatus using the measurement light applied to the measurement member, to a position of a tool center point of the processing apparatus, based on position transformation information:
• the measurement control apparatus transmitting first position information indicating the position of the tool center point, to a processing control apparatus configured to control a movement of the movable part:
• and
• the measurement control apparatus calculating the position transformation information, based on the position of the measurement member measured by the first measurement apparatus using the measurement light applied to the measurement member in a first state in which the tool center point is located at a predetermined position.