Dry film membrane tenting

Abstract

Apparatuses (e.g., inkjet printheads) having a dryfilm tenting structure and methods for fabricating the same are disclosed. In some embodiments, an inkjet printhead comprises a first actuator substrate having one or more cavities for fluid routing and include an actuator cavity; an actuator stack coupled to the first structure and positioned at least partially over the actuator cavity, the actuator stack comprising a membrane, an actuator coupled to a first side of the membrane, and a tented structure coupled to the actuator substrate to create an enclosed cavity large enough to enable the membrane in the cavity to bow without contacting the tented structure.

Dependencies are inferred from the claim text.