Substrate processing system and substrate processing method

A substrate processing method used in a substrate processing system,

• wherein the substrate processing system includes:
• a batch-type processor configured to collectively process a plurality of substrates;
• and
• a single-substrate-type processor configured to process the plurality of substrates one by one,
• the substrate processing method comprising:
• calculating a batch-type processing time including a time required for processing the plurality of substrates by the batch-type processor, based on recipe information including an procedure in which the plurality of substrates is processed;
• and
• selecting, based on correspondence information in which inspection items and inspection times in an inspection on the single-substrate-type processor are associated with each other, one or two or more of the inspection items for which the inspection times are equal to or less than the batch-type processing time, and executing the inspection on the selected one or two or more inspection items.