Microelectromechanical systems device and manufacturing method thereof
AssigneeUnited Microelectronics Corp.
InventorsJung Hao Chang, Weng-Yi Chen, Chang-Sheng Hsu, Shih-Wei Li
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Abstract
A microelectromechanical systems (MEMS) device including a substrate, a membrane layer and a plurality of patterned backplates is provided. The membrane layer is disposed on the substrate and has a plurality of corrugated structures. A top surface of the membrane layer has a rounded-corner feature, and a bottom surface of the membrane layer has a sharp-corner feature. The plurality of patterned backplates are disposed above the membrane layer. A manufacturing method of a MEMS device is also provided.
Claims10
A microelectromechanical systems (MEMS) device, including:
- a substrate;
- a membrane layer, disposed on the substrate and has a plurality of corrugated structures, wherein a top surface of the membrane layer has a rounded-corner feature, and a bottom surface of the membrane layer has a sharp-corner feature;
- and
- a plurality of patterned backplates, disposed above the membrane layer.
A manufacturing method of a microelectromechanical systems (MEMS) device, including:
- forming a first insulating layer on a substrate, wherein a first side of the substrate has a plurality of grooves, and a top surface of the first insulating layer has a recessed feature in the plurality of grooves;
- forming a membrane layer on the first insulating layer, wherein the membrane layer has a plurality of corrugated structures, a top surface of the membrane layer has a rounded-corner feature, and a bottom surface of the membrane layer has a sharp-corner feature;
- and
- forming a plurality of patterned backplates on the first side of the substrate.
Dependencies are inferred from the claim text.