Method and apparatus for synthesizing metal thin film for display
AssigneeAK Technology, Inc.
InventorJEOMGIL MOON
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Abstract
The present invention relates to an electroplating apparatus and an electroplating method, and more specifically, to an electroplating apparatus and an electroplating method, which can plate a target on one side of a substrate while moving an anode horizontally, and consistently maintain the concentration of iron ions in a plating solution through the injection of inert gas when the plating solution is supplied during the plating process, thereby providing excellent plating quality.
Claims11
An electroplating apparatus comprising:
- a tank unit having an open top and an internal accommodation space;
- an electroplating unit installed in the tank unit to plate a target object arranged inside the tank unit depending on power supplied from a power supply unit;
- a plating solution supply unit supplying plating solution to the electroplating unit and circulating the plating solution by receiving the plating solution from the tank unit;
- and
- a gas supply unit supplying inert gas to the electroplating unit,
- wherein the electroplating unit sprays the supplied plating solution and inert gas onto the target object.
An electroplating method for plating a target object in a tank unit using an electroplating unit positioned above the tank unit, comprising:
- spraying plating solution and inert gas onto the target object through a supply nozzle of the electroplating unit.
Dependencies are inferred from the claim text.