Segmentation-based care area setup for inspection of a specimen using edge detection

A non-transitory computer-readable medium, storing program instructions executable on a computer system for performing a computer-implemented method for setting up care areas for inspection of a specimen, wherein the computer-implemented method comprises:

• acquiring an area of interest image for a specimen from one or more images of the specimen generated by an imaging subsystem;
• segmenting the area of interest image based on intensity of pixels in the area of interest image thereby separating the area of interest image into pixels corresponding to one or more specimen structures in the area of interest image having an intensity different than other pixels in the area of interest image;
• detecting edges of the one or more specimen structures in the area of interest image based on the pixels corresponding to the one or more specimen structures;
• determining one or more characteristics of one or more care areas in the images of the specimen based on the detected edges;
• and
• storing information for the one or more care areas for use in inspection of the specimen.

A computer-implemented method for setting up care areas for inspection of a specimen, comprising:

• acquiring an area of interest image for a specimen from one or more images of the specimen generated by an imaging subsystem;
• segmenting the area of interest image based on intensity of pixels in the area of interest image thereby separating the area of interest image into pixels corresponding to one or more specimen structures in the area of interest image having an intensity different than other pixels in the area of interest image;
• detecting edges of the one or more specimen structures in the area of interest image based on the pixels corresponding to the one or more specimen structures;
• determining one or more characteristics of one or more care areas in the images of the specimen based on the detected edges;
• and
• storing information for the one or more care areas for use in inspection of the specimen, wherein the acquiring, segmenting, detecting, determining, and storing steps are performed by a computer subsystem coupled to the imaging subsystem.