Dielectric windows for groups of vias through semiconductor substrates
AssigneeMicron Technology, Inc.
InventorsBharat Bhushan, Kunal R. Parekh, Brent Keeth, Akshay N. Singh
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AssigneeMicron Technology, Inc.
InventorsBharat Bhushan, Kunal R. Parekh, Brent Keeth, Akshay N. Singh
Estimating the term…
Methods, systems, and devices for dielectric windows for groups of vias through semiconductor substrates are described. For example, a semiconductor component (e.g., a semiconductor die, a semiconductor wafer) may be formed with one or more dielectric windows through a substrate of the semiconductor component, through which a group of multiple vias may be formed to support signaling with circuitry of the semiconductor component. In some implementations, a set of multiple cavities may be formed through a given dielectric portion and, in each of the multiple cavities, a conductive portion (e.g., one or more conductive materials) may be formed to support multiple electrically isolated contacts. In various examples, such vias may include contacts themselves (e.g., for vias that extend to the surface of the semiconductor component), or may be otherwise coupled with (e.g., contiguous with, electrically coupled with) a contact portion that has a different cross-section than the vias.
A method for semiconductor manufacture, comprising:
A semiconductor component, comprising:
A semiconductor component formed by a process, comprising:
A semiconductor system, comprising:
A semiconductor system, comprising:
Dependencies are inferred from the claim text.