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US 2025/0218845 A1Published application
Sample holder
AssigneeKYOCERA Corporation
InventorTomoya TAKASAKI
Life of this patent
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Abstract
A sample holder includes a ceramic plate, a heat-resistant member, and a base member. The ceramic plate, the heat-resistant member, and the base member are located in this order. The heat-resistant member has a coefficient of thermal expansion smaller than that of the ceramic plate, and is not bonded to the ceramic plate.
Claims15
A sample holder comprising:
- a ceramic plate;
- a heat-resistant member;
- and
- a base member, wherein
- the ceramic plate, the heat-resistant member, and the base member are located in this order, and
- the heat-resistant member has a coefficient of thermal expansion smaller than a coefficient of thermal expansion of the ceramic plate, and is not bonded to the ceramic plate.
3 more elements
Dependencies are inferred from the claim text.