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US 2025/0218840 A1Published application
Apparatus and method for detecting substrate state
AssigneeSemes Co., Ltd.
InventorJae Won SHIN
Life of this patent
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Abstract
The present disclosure provides an apparatus and method for detecting a substrate state, and provided is the apparatus for detecting a substrate state, including: a substrate transfer unit transferring a substrate; a sensor unit including one or more sensor arrays, and detecting a presence or an absence of the substrate in a position in which the one or more sensor arrays are disposed; and a detection unit detecting an alignment state of the substrate.
Claims20
An apparatus for detecting a substrate state, comprising:
- a substrate transfer unit transferring a substrate;
- a sensor unit including one or more sensor arrays, and detecting a presence or an absence of the substrate in a position in which the one or more sensor arrays are disposed;
- and
- a detection unit detecting an alignment state of the substrate,
- wherein the detection unit detects an edge position of the substrate based on a sensing result of the sensor unit while the substrate is advanced in a first direction by the substrate transfer unit, and detects at least one of an alignment state of a center of the substrate and an alignment state of a notch of the substrate based on the edge position of the substrate.
2 more elements
A method for detecting a substrate state, the method comprising:
- transferring a substrate in a first direction;
- detecting a fifth edge position of the substrate;
- detecting a center position of the substrate based on the fifth edge position;
- moving a center of the substrate onto a center line in parallel with the first direction and passing through a target center position of the substrate;
- detecting a sixth edge position of the substrate;
- determining an alignment state of a notch of the substrate based on the sixth edge position.
3 more elements
An apparatus for detecting a substrate state, comprising:
- substrate a transfer unit including a hand for supporting a substrate and transferring the substrate;
- a sensor unit including one or more sensor arrays including a signal generator and a signal receiver, and sensing a presence or an absence of the substrate on a position in which the one or more sensor arrays are disposed;
- a detection unit detecting an alignment state of the substrate;
- and
- a substrate support unit including a substrate support surface including a target position of the substrate,
- wherein the detection unit detects an edge position of the substrate based on a sensing result of the sensor unit while the substrate is advanced in a first direction by the substrate transfer unit, and detects a position of a center of the substrate and an alignment state of a notch of the substrate based on the edge position of the substrate, and
- wherein the one or more sensor arrays include a first sensor disposed on a notch line in parallel with the first direction and passing through a target notch position of the substrate.
4 more elements
Dependencies are inferred from the claim text.