Container transporting apparatus and logistics processing system including the same
AssigneeSemes Co., Ltd.
InventorsGeo Chul JEONG, Byung Kwon LEE, Yeong Jae CHOE, Eun Ji CHOI
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AssigneeSemes Co., Ltd.
InventorsGeo Chul JEONG, Byung Kwon LEE, Yeong Jae CHOE, Eun Ji CHOI
Estimating the term…
A container transporting apparatus equipped with a non-contact gear and a logistics processing system including the same are provided. The logistics processing system is installed in a semiconductor manufacturing plant and includes a container transporting apparatus for transporting a container containing a plurality of substrates; a container storage apparatus for storing the container therein; and a control device configured to control each of the container transporting apparatus and the container storage apparatus, wherein the container transporting apparatus includes a non-contact gear.
A logistics processing system installed in a semiconductor manufacturing plant, the logistics processing system comprising:
A container transporting apparatus for transporting a container containing a plurality of substrates in a semiconductor manufacturing plant, the apparatus comprising:
A logistics processing system installed in a semiconductor manufacturing plant, the logistics processing system comprising:
Dependencies are inferred from the claim text.