3 pillar boat in a load lock chamber and methods of making pillar boat in load locks for semiconductor processing systems

A wafer boat configured to support one or more wafers, the wafer boat comprising:

• a first pillar having a first plurality of protrusion elements, wherein the first pillar is defined by a first inner surface, a first outer surface, a first top surface and a first bottom surface, wherein the first plurality of protrusion elements extend from the first inner surface;
• a second pillar having a second plurality of protrusion elements, wherein the second pillar is defined by a second inner surface, a second outer surface, a second top surface and a second bottom surface, wherein the second plurality of protrusion elements extend from the second inner surface;
• a third pillar having a third plurality of protrusion elements, wherein the third pillar is defined by a third inner surface, a third outer surface, a third top surface and a third bottom surface, wherein the third plurality of protrusion elements extend from the third inner surface;
• a triangular top member having a first top junction, a second top junction and a third top junction, wherein the triangular top member is coupled to the first pillar, the second pillar and the third pillar, such that the first top surface is coupled to the first top junction, the second top surface is coupled to the second top junction and the third top surface is coupled to the third top junction;
• and
• a triangular bottom member having a first bottom junction, a second bottom junction and a third bottom junction, wherein the triangular bottom member is coupled to the first pillar, the second pillar and the third pillar, such that the first bottom surface is coupled to the first bottom junction, the second bottom surface is coupled to the second bottom junction and the third bottom surface is coupled to the third bottom junction,
• wherein the triangular top member and the triangular bottom member are parallel to each other, wherein the wafer boat defines a central axis that extends vertically and is further parallel to the first pillar, the second pillar and the third pillar, and wherein the first plurality of protrusion elements, the second plurality of protrusion elements and the third plurality of protrusion elements extend towards the central axis to define a plurality of wafer slots, wherein each wafer slot is configured to support a wafer.