Substrate measurement subsystem

A substrate measurement subsystem, comprising:

• a feature identification component configured to identify an identification feature of substrates within the substrate measurement subsystem;
• one or more sensing components configured to obtain measurements for one or more portions of a substrate within the substrate measurement subsystem;
• and
• a controller coupled to the feature identification component and the one or more sensing components, wherein the controller is to:
• identify, based on a signal from the identification feature component, an identification feature of a substrate in a substrate measurement subsystem, wherein the identification feature is located at a predefined location relative to a reference location of the substrate;
• determine a position of the substrate within the substrate measurement subsystem based on the identified identification feature;
• based on the determined position of the substrate, cause the one or more sensing components to capture spectral data representing features of at least one of the reference location of the substrate or another location of the substrate;
• and
• determine whether to update a process recipe associated with the substrate based on the captured spectral data.

A non-transitory computer readable storage medium comprising instructions that, when executed by a set of one or more processing devices, cause the set of one or more processing devices to:

• identify an identification feature of a substrate in a substrate measurement subsystem, wherein the identification feature is located at a predefined location relative to a reference location of the substrate;
• determine a position of the substrate within the substrate measurement subsystem based on the identified identification feature;
• based on the determined position of the substrate, cause one or more sensing components of the substrate measurement subsystem to capture spectral data representing features of at least one of the reference location of the substrate or another location of the substrate;
• and
• determine whether to update a process recipe associated with the substrate based on the captured spectral data.