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US 2025/0215548 A1Published application
Multi-metal oxide coatings, related devices and methods
AssigneeEntegris, Inc.
InventorsBaosheng Sang, Nilesh Gunda, Samuel J. Angeloni
Life of this patent
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Abstract
Multi-metal oxide coatings, and related devices and related methods are provided, among other things. A device comprises a substrate, and a coating on the substrate. The coating comprises a multi-metal oxide. The multi-metal oxide comprises a first species and a second species. A concentration of at least one of the first species, the second species, or any combination thereof, varies through a thickness of the coating. The device can be a component used in a semiconductor manufacturing process.
Claims23
A device comprising:
- a substrate;
- and
- a coating disposed on the substrate,
- wherein the coating comprises a multi-metal oxide,
- wherein the multi-metal oxide comprises a first species and a second species,
- wherein a concentration of at least one of the first species, the second species, or any combination thereof, varies through a thickness of the coating.
3 more elements
A method comprising:
- sputtering a first metal species from a first target;
- sputtering a second metal species from a second target;
- and
- depositing at least one of the first metal species, the second metal species, or any combination thereof, to form a multi-metal oxide film on a substrate,
- wherein a ratio of the first metal species, to a sum of the first metal species and the second metal species, is 0.3 to 0.85.
2 more elements
Dependencies are inferred from the claim text.