Heat transfer member, method for manufacturing heat transfer member, and plasma treatment device
AssigneeMitsubishi Materials Corporation
InventorsMiho Shoji, Toshihiro Zushi, Kosei Hirano, Tetsuya Yamamoto
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Abstract
This heat transfer member is a heat transfer member constituted of a fired body of a molded object including a fluorine-based resin or a fluorine-based elastomer, in which a hardness measured using a type AM durometer conforming to JIS K 6253-3:2012 is lower by 7 or greater than a hardness of the molded object. This heat transfer member has a high plasma resistance and can maintain a high state of adhesion with respect to various members over a long period of time.
Claims12
A heat transfer member constituted of a fired body of a molded object including a fluorine-based resin or a fluorine-based elastomer,
- wherein a hardness measured using a type AM durometer conforming to JIS K 6253-3:2012 is lower by 7 or greater than a hardness of the molded object.
A heat transfer member constituted of a molded product including a fluorine-based resin or a fluorine-based elastomer,
- wherein an amount of change in hardness measured using a type AM durometer conforming to JIS K 6253-3:2012 from before heating after heating at 250° C. for 25 hours is within a range of ±5.
A method for manufacturing a heat transfer member including a fluorine-based resin or a fluorine-based elastomer, the method comprising:
- a molding step of producing a molded object by heating and molding a material including the fluorine-based resin or the fluorine-based elastomer;
- and
- a firing step of firing the molded object and producing a softened fired product having a hardness lower by 7 or greater than a hardness of the molded object measured using a type AM durometer conforming to JIS K 6253-3:2012,
- wherein the heat transfer member is constituted of the softened fired product.
Dependencies are inferred from the claim text.