Energy refeeding module, switching circuit and embodiment, plasma processing system, and a method of producing rectangular voltage output pulses for a plasma processing load

Abstract

An energy refeeding module for a switching circuit with a switching unit configured to be connectable to a DC voltage source includes a rectifying circuit configured to be connected with a positive end of a DC-side thereof to a positive connection of the DC voltage source, with a negative end of the DC-side thereof to a negative connection of the DC voltage source, and a transformer. The transformer includes a primary winding configured to be connected in series between the switching unit and an output of the energy refeeding module, and configured to have both a stray inductance and parasitic resistance low enough to lead one or a combination of the following: the high value of voltage, the high value of voltage rise, and the high current value. The transformer includes a secondary winding connected to an AC-side of the rectifying circuit.

Dependencies are inferred from the claim text.