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US 2025/0208482 A1Published application
Through silicon via for thin film lithium-containing electro-optic devices
OwnerChristian Reimer, Mian Zhanginventors
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Abstract
An electro-optic device is described. The electro-optic device includes a substrate, an oxide layer and a thin film lithium-containing (TFLC) electro-optic layer. The oxide layer is on the substrate. The TFLC electro-optic layer is on the oxide layer. The TFLC electro-optic layer includes a waveguide. The electro-optic device also includes a via extending through the substrate, the oxide layer, and the TFLC electro-optic layer. The via includes a conductive filler.
Claims20
An electro-optic device, comprising:
- a substrate;
- an oxide layer on the substrate;
- a thin film lithium-containing (TFLC) electro-optic layer on the oxide layer, the TFLC electro-optic layer including a waveguide;
- and
- a via extending through the substrate, the oxide layer, and the TFLC electro-optic layer, the via including a conductive filler.
2 more elements
An electro-optic device, comprising:
- a substrate, the substrate being a silicon substrate having a substrate thickness of at least one hundred micrometers;
- an oxide layer on the substrate, the oxide layer being a silicon dioxide layer having a thickness of at least three micrometers and not more than ten micrometers;
- a thin film lithium-containing (TFLC) electro-optic layer on at least a portion of the oxide layer, the TFLC electro-optic layer including a waveguide;
- and
- a via extending through the substrate, the oxide layer, and the TFLC electro-optic layer, the via including a conductive filler;
- wherein the electro-optic device is mounted on an additional substrate having an electrical connection, the electro-optic device being electrically connected to the electrical connection by the conductive filler.
3 more elements
A method, comprising:
- providing an electro-optic device including a substrate, an oxide layer on the substrate, and a thin film lithium-containing (TFLC) electro-optic layer on the oxide layer, the TFLC electro-optic layer including a waveguide;
- providing a via extending through the substrate, the oxide layer, and the TFLC electro-optic layer, the via including a conductive filler.
Dependencies are inferred from the claim text.