Coplanarity assist unit, semiconductor testing apparatus including the coplanarity assist unit and method of setting coplanarity
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJyun-Cheng Huang, Chin-Ta Chen
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Abstract
A coplanarity assist unit includes a plurality of distance sensors mounted on at least one of a lower body or a upper body at a plurality of locations, respectively, and configured to detect a distance between the lower body and the upper body at the plurality of locations, and a coplanarity assistant configured to determine whether coplanarity exists between the lower body and the upper body and assist with setting coplanarity between the lower body and the upper body based on an output of the plurality of distance sensors.
Claims20
A coplanarity assist unit, comprising:
- a plurality of distance sensors mounted on at least one of a lower body or a upper body at a plurality of locations, respectively, wherein each of the plurality of distance sensors are configured to detect a distance between the lower body and the upper body at the plurality of locations;
- and
- a coplanarity assistant configured to determine based on an output of the plurality of distance sensors whether coplanarity exists between the lower body and the upper body and assist with a position of the lower body and the upper body in order to set the coplanarity between the lower body and the upper body.
A semiconductor testing apparatus, comprising:
- a prober configured to support a probe card;
- a tester head configured to support a device under test (DUT);
- and
- a coplanarity assist unit comprising a plurality of distance sensors and configured to determine based on an output of the plurality of distance sensors whether coplanarity exists between the prober and the tester head and to assist with setting a position of a lower body and a upper body in order to set the coplanarity between the lower body and the upper body.
A method of setting coplanarity, the method comprising:
- detecting a distance between a lower body and an upper body;
- determining whether coplanarity exists between the lower body and the upper body based on an output of the plurality of distance sensors;
- and
- in response to determining that coplanarity does not exist:
- determining an adjustment to a position of the upper body for setting a coplanarity between the lower body and the upper body based on the output of the plurality of distance sensors;
- and
- adjusting the position of the upper body based on the determined adjustment to the adjustment to the position of the upper body.
Dependencies are inferred from the claim text.