Ultra-high precision pneumatic force servo system and intelligent control parameter optimization method therefor

An ultra-high precision pneumatic force servo system, comprising an actuator module, a pressure control module, an air source module, and an air supply module;

• wherein the actuator module is a double-acting air-floating frictionless cylinder 10;
• the pressure control module comprises an industrial personal computer 1, a data acquisition card 2, a three-position five-way solenoid valve 3, a two-position three-way solenoid valve I 4, a two-position three-way solenoid valve II 7, a high-precision pressure sensor I 6, a high-precision pressure sensor II 9, a small air tank I 5, and a small air tank II 8;
• the air supply module comprises a pressure relief valve I 11, a pressure relief valve II 15, a small air tank III 12, a small air tank IV 16, an air dryer 13, and a precision filter 14;
• the air source module comprises an air source 17, a pressure relief valve III 18, and a large air tank 19;
• the compressed air generated by the air source 17 is delivered to the large air tank 19 by means of the action of the pressure relief valve III 18, so as to provide compressed air for each pneumatic branch;
• the pressure relief valve I 11, the small air tank III 12, the air dryer 13, and the precision filter 14 constitute a branch I for supplying air to an air bearing of the air-floating frictionless cylinder 10, and the pressure relief valve II 15 and the small air tank IV 16 constitute a branch II for supplying air to an air-floating piston of the air-floating frictionless cylinder 10, thereby causing the air-floating frictionless cylinder to work normally;
• the upstream end of the three-position five-way solenoid valve 3 is connected to the large air tank 19 as a branch III;
• two ports of the three-position five-way solenoid valve 3 are connected to the small air tank I 5 and the small air tank II 8, respectively, by means of the two-position three-way solenoid valve I 4 and the two-position three-way solenoid valve II 7;
• the small air tank I 5 and a rodless chamber of the air-floating frictionless cylinder 10 form a controlled chamber I, and the small air tank II 8 and a rod chamber of the air-floating frictionless cylinder 10 form a controlled chamber II;
• the high-precision pressure sensor I 6 and the high-precision pressure sensor II 9 feedback pressure information of the chamber I and pressure information of the chamber II, respectively, to the industrial personal computer 1 by means of the data acquisition card 2, and the industrial personal computer 1 executes respective fuzzy PI control algorithms and then outputs voltage signals to the three-position five-way solenoid valve 3 by means of the data acquisition card 2.