Apparatus and process for splitting up substances

A process reactor (10) for separating molecular components of a gaseous substance (46) or mixture of substances in a separation process, comprising:

• a reaction chamber (12) with a gas inlet (28, 40) and a gas outlet (73);
• a gas supply (32), which directs the gaseous substance (46) or mixture of substances from the gas inlet (40) to a reaction site (21) in the reaction chamber (12);
• separating means (53) in the reaction chamber (12) for separating the molecular components at the reaction site (21);
• a power supply (50, 58) for the separating means (53);
• at least one molecule separator (76), which separates different ones of the molecular components or molecules that are newly formed from the molecular components;
• wherein the separating means (53) comprise at least two spaced electrodes (16, 18),
• wherein the at least two spaced electrodes (16, 18) are subjected to an RF frequency to generate a plasma (52) from a plasma gas, and
• wherein a pump (74) is provided for operating the reaction chamber (12) under vacuum.