Method for manufacturing electrodes

An electrode array comprising a plurality of electrodes, wherein the plurality of electrodes comprise noble metal, wherein the plurality of electrodes are manufactured via a method comprising:

• providing a substrate having a dielectric layer in physical contact therewith, wherein the dielectric layer comprises at least a sacrificial part, wherein the sacrificial part comprises a top surface;
• forming a conductive layer on the dielectric layer and in physical contact with the top surface of the sacrificial part, wherein the conductive layer comprises the noble metal;
• providing a masking layer over the conductive layer;
• patterning the masking layer to expose at least the conductive layer above the sacrificial part thereby defining a plurality of electrodes wherein the smallest distance between the plurality of electrodes is not larger than 500 nm;
• etching the conductive layer by ion-beam thereby forming the plurality of electrodes comprising the noble metal;
• etching at least a portion of the sacrificial part by dry etching such that resistance at the smallest distance between the plurality of electrodes is at least 1e8 ohm;
• and
• removing the masking layer.

An electroactive device for bio-material processing, the electroactive device comprising:

• an electrode array comprising a plurality of electrodes, wherein the plurality of electrodes comprise noble metal and wherein the plurality of electrodes are manufactured via a method comprising:
• providing a substrate having a dielectric layer in physical contact therewith, wherein the dielectric layer comprises at least a sacrificial part, wherein the sacrificial part comprises a top surface;
• forming a conductive layer on the dielectric layer and in physical contact with the top surface of the sacrificial part, wherein the conductive layer comprises the noble metal;
• providing a masking layer over the conductive layer;
• patterning the masking layer to expose at least the conductive layer above the sacrificial part thereby defining a plurality of electrodes wherein the smallest distance between the plurality of electrodes is not larger than 500 nm;
• etching the conductive layer by ion-beam thereby forming the plurality of electrodes comprising the noble metal;
• etching at least a portion of the sacrificial part by dry etching such that resistance at the smallest distance between the plurality of electrodes is at least 1e8 ohm;
• and
• removing the masking layer;
• and
• a reservoir for containing bio-material in an electrolyte during operation, wherein the electrode array is arranged such that the electrode array is exposed to the electrolyte during the operation of the electroactive device.