Controllable Reflective Optical Unit With MEMS Tip-Tilt Actuator
AssigneeMems Drive (Nanjing) Co., Ltd.
InventorsXiaolei LIU, Guiqin WANG
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Abstract
An optical micro-electrical-mechanical system (MEMS) unit is provided, which includes: a MEMS tip-tilt actuator; a polymer layer disposed on at least a portion of the MEMS tip-tilt actuator; and a first plate disposed on the polymer layer oppositely to the MEMS tip-tilt actuator. The MEMS tip-tilt actuator includes: an outer frame that is fixed; a second plate that is movable; a motion control structure between the outer frame and the second plate; and a bending film configured to deform the motion control structure and thereby control a precise position of the second plate.
Claims20
An optical micro-electrical-mechanical system (MEMS) unit, comprising:
- a MEMS tip-tilt actuator;
- a polymer layer disposed on at least a portion of the MEMS tip-tilt actuator;
- and
- a first plate disposed on the polymer layer oppositely to the MEMS tip-tilt actuator;
- wherein the MEMS tip-tilt actuator comprises:
- an outer frame that is fixed;
- a second plate that is movable;
- a motion control structure between the outer frame and the second plate;
- and
- a bending film configured to deform the motion control structure and thereby control a precise position of the second plate.
An optical system comprising:
- an imager;
- a lens group;
- and
- an optical micro-electrical-mechanical system (MEMS) unit comprising:
- a MEMS tip-tilt actuator;
- a polymer layer disposed on at least a portion of the MEMS tip-tilt actuator;
- and
- a first plate disposed on the polymer layer oppositely to the MEMS tip-tilt actuator;
- wherein the MEMS tip-tilt actuator comprises:
- an outer frame that is fixed;
- a second plate that is movable;
- a motion control structure between the outer frame and the second plate;
- and
- a bending film configured to deform the motion control structure and thereby control a precise position of the second plate.
Dependencies are inferred from the claim text.