Method and device for forming a structure on a workpiece

A method for forming a structure on a workpiece (2) by processing radiation,

• the method comprising:
• a. providing the workpiece (2) on a transport device (1);
• b. moving the workpiece (2) along a trajectory by the transport device (1) and processing the workpiece (2) using processing radiation while the workpiece (2) is moved by the transport device (1), with, in order to form the structure, a time of processing being controlled by a control device (7) and, a location of the processing of the workpiece (2) by the processing radiation being controlled by a control device (7)-controlled optical deflection unit (4, 4′) for processing radiation, and
• in method step B, while the workpiece (2) is processed by the processing radiation, acquiring correction data of the workpiece (2) by at least one optical sensor, the correction data comprising at least one of movement data of the workpiece (2) or position data of a structure created on the workpiece (2) the processing radiation, and, dependent on the correction data, deflection of processing radiation brought about by the deflection unit (4, 4′) is determined by the control device (7).