Temperature control device, substrate processing apparatus, and temperature control method

A temperature control method for a temperature control device to control a temperature of a temperature controller by circulating a fluid through the temperature controller, the temperature control device including:

• a first temperature adjuster configured to control the fluid to a first temperature;
• a temperature adjustment module including a second temperature adjuster configured to control the fluid controlled to the first temperature to a second temperature;
• a first temperature-control flow path provided between the first temperature adjuster and the second temperature adjuster;
• a second temperature-control flow path provided between the second temperature adjuster and the temperature controller;
• a bypass flow path provided between the first temperature adjuster and the temperature controller and configured to supply the fluid controlled to the first temperature to the temperature controller without passing through the second temperature-control flow path;
• a return flow path provided between the temperature controller and the first temperature adjuster;
• a tank configured to store the fluid, the tank being provided in the middle of the first temperature-control flow path between the first temperature adjuster and the temperature adjustment module;
• and
• a flow ratio adjuster configured to adjust a flow ratio between the fluid supplied from the second temperature-control flow path to the temperature controller and the fluid supplied from the bypass flow path to the temperature controller,
• the temperature control method comprising:
• controlling the flow ratio adjuster to adjust the flow ratio to control a temperature of the fluid flowing through the temperature controller.

A temperature control method comprising:

• circulating a fluid through a temperature controller disposed in a plasma processing chamber;
• controlling, by a first temperature adjuster, the fluid to a first temperature after the fluid has passed through the temperature controller;
• storing the fluid controlled to the first temperature in a tank;
• then
• pumping, via a pump, the fluid from the tank to a temperature adjustment module, the temperature adjustment module including:
• a second temperature adjuster in a first flow path;
• and
• a bypass flow path;
• and
• controlling, by the second temperature adjuster, to heat the fluid to a second temperature, the second temperature being higher than the first temperature, wherein
• the tank is provided between the first temperature adjuster and the temperature adjustment module.