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AssigneeHeraeus Electronics GmbH & Co. KG
InventorsRichard WACKER, Leszek NIEWOLAK, Stefanie STOICA, Carsten SCHAUER
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A metal-ceramic composite containing a ceramic substrate comprising a front side and a rear side and containing silicon nitride, a metal coating on the front side of the ceramic substrate, wherein the metal coating has at least one recess, and a surface of the ceramic substrate is exposed by the recess, the ceramic substrate shows an Si2p signal in the range of 96 to 107 eV in an energy spectrum recorded by X-ray photoelectron spectroscopy (hereinafter also referred to as XPS spectrum), at least in the region of the recess, wherein the Si2p signal has the following: one or more peaks that each have a maximum in the range of 98.0 to 100.0 eV, one or more peaks that each have a maximum in the range of 101.0 to 102.2 eV, one or more peaks that each have a maximum in the range of 102.5 to 104.0 eV.
A metal-ceramic composite, containing a ceramic substrate comprising a front side and a rear side and containing silicon nitride, a metal coating on the front side of the ceramic substrate, wherein the metal coating has at least one recess, and a surface of the ceramic substrate is exposed by the recess, the ceramic substrate shows an Si2p signal in the range of 96 to 107 eV in an energy spectrum recorded by X-ray photoelectron spectroscopy, at least in the region of the recess, wherein the Si2p signal has the following:
Dependencies are inferred from the claim text.