Transferring apparatus

A transferring apparatus comprising:

• a driving unit provided with a driving wheel and connected with a housing;
• a hoist unit provided in the housing;
• a horizontal moving unit moving in a direction orthogonal to a driving direction of the driving unit between the housing and the hoist unit to move the hoist unit relative to the housing;
• and
• a hand unit provided with a gripper that grips a transfer target,
• wherein the hoist unit includes:
• a belt unit connected to the hand unit, including a first hoist belt and a second hoist belt;
• and
• a hoist driving unit configured to wind or unwind the belt unit, and
• a first surface of the first hoist belt and a second surface of the second hoist belt are disposed in an X shape by crossing each other at an upper portion, and are extended in a downward direction.

A transferring apparatus provided in a semiconductor fabricating factory, the transferring apparatus comprising:

• a driving unit provided with a driving wheel and connected with a housing;
• a hoist unit provided in the housing;
• a horizontal moving unit moving in a direction orthogonal to a driving direction of the driving unit between the housing and the hoist unit to move the hoist unit relative to the housing;
• and
• a hand unit provided with a gripper that grips a transfer target,
• wherein the hoist unit includes:
• a belt unit connected to the hand unit, including a first hoist belt, a second hoist belt and a third hoist belt;
• and
• a hoist driving unit configured to wind or unwind the belt unit,
• the hoist driving unit includes:
• a motor provided with a motor shaft;
• a driving pulley connected to the motor shaft to receive a rotational force of the motor;
• a driven pulley connected to the driving pulley by a timing belt;
• an input shaft extended to both sides of the driven pulley;
• a first bevel gear connected to one end of the input shaft at an acute angle;
• a second bevel gear connected to the other end of the input shaft at an obtuse angle symmetrical with the first bevel gear;
• a first output shaft connected to the first bevel gear;
• a second output shaft connected to the second bevel gear;
• a first drum connected to the first output shaft, on which the first hoist belt is wound;
• a second drum connected to the second output shaft, on which the second hoist belt is wound;
• a third drum surrounding the input shaft to receive a rotational force of the input shaft, on which the third hoist belt is wound, and disposed between the first drum and the second drum;
• a first guide roller guiding movement of the first hoist belt while facing the first drum;
• a second guide roller guiding movement of the second hoist belt while facing the second drum;
• a third guide roller guiding movement of the third hoist belt while facing the third drum;
• a first anti-shaking plate on which the first hoist belt is disposed between the first guide rollers;
• a second anti-shaking plate on which the second hoist belt is disposed between the second guide rollers;
• and
• a third anti-shaking plate on which the third hoist belt is disposed between the third guide rollers,
• each of a first surface of the first hoist belt and a second surface of the second hoist belt is disposed toward a central direction of the housing rather than the driving direction of the driving unit, and thus is disposed to be misaligned at an angle without being parallel with each of the driving direction of the driving unit and the moving direction of the horizontal moving unit,
• the first surface between the first drum and the first guide roller and the second surface between the second drum and the second guide roller cross each other to constitute an ‘X’ shape, and
• a third surface of the third hoist belt faces a point where the first surface of the first hoist belt and the second surface of the second hoist belt cross each other.