Apparatus for manufacturing semiconductor device, semiconductor device manufacturing system, and filter device

A semiconductor device manufacturing system comprising:

• a semiconductor wafer processing apparatus;
• a liquid tank configured to store a liquid for manufacturing a semiconductor device;
• a liquid supply system for supplying the liquid from the liquid tank to the semiconductor wafer processing apparatus;
• and
• a filter device disposed on the liquid supply system, wherein the filter device includes a housing enclosing a filter membrane, the filter membrane includes a base membrane coated with a coating material,
• wherein the base membrane comprises a ceramic material and a plurality of through holes, and
• a total number of the plurality of through holes per square micron ranges from 100 to 600.

A filter device comprising:

• a filter structure configured to filter particles from a liquid to be contacted with a semiconductor substrate, wherein the filter structure includes:
• a homogeneous filter membrane comprising a ceramic and a first plurality of through holes, wherein a variation of diameters of the first plurality of through holes ranges from 5% to 25% of an average diameter of the first plurality of through holes, and
• a heterogenous filter membrane attached to the homogeneous filter membrane, the heterogenous filter membrane comprising a second plurality of through holes, wherein a variation of diameters of the second plurality of through holes is more than 30% of an average diameter of the second plurality of through holes;
• and
• a filter housing containing the filter structure and including an inlet and an outlet, wherein the filter housing is configured to direct the liquid through the filter structure.