Deep temperature measuring device and deep temperature measuring method
AssigneeSEMITEC Corporation
InventorsKatsuhisa TAGUCHI, Toshiyuki NOJIRI
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AssigneeSEMITEC Corporation
InventorsKatsuhisa TAGUCHI, Toshiyuki NOJIRI
Estimating the term…
Provided is a deep temperature measuring device and a deep temperature measuring method capable of measuring a deep temperature of a measured object with high precision, high accuracy, and high-speed responsiveness. The above-described problem is solved by a deep temperature measuring device comprising a thermosensitive part (Ts) that senses temperature, a measurement thin film thermistor capable of measuring temperature by the thermosensitive part (Ts) being brought into contact with a measured object, a heating element layer that heats the measurement thin film thermistor, a control thin film thermistor disposed sandwiching a first heat-insulating layer with the measurement thin film thermistor and the control thin film thermistor and configured to control a temperature of the heating element layer so that the temperature is equal to a temperature of the measurement thin film thermistor, and a second heat-insulating layer that covers the heating element layer.
1-10. (canceled)
A deep temperature measuring device comprising:
A deep temperature measuring device provided with a layered structure including a thermosensitive part that senses temperature and includes a measurement thin film thermistor capable of measuring temperature by being brought into contact with a measured object, a control thin film thermistor disposed sandwiching a first heat-insulating layer with the measurement thin film thermistor and configured to control a temperature of a heating element layer that heats the measurement thin film thermistor so that temperatures of the heating element layer and the measurement thin film thermistor are made equal, and a second heat-insulating layer that covers the heating element layer and the control thin film thermistor on the first heat-insulating layer, the first heat-insulating layer and the control thin film thermistor being layered in this order on the measurement thin film thermistor,
Dependencies are inferred from the claim text.