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US 2025/0169345 A1Published application
Processing device
AssigneeSamsung Display Co., Ltd.
InventorJAESUNG LIM
Life of this patent
Estimating the term…
Abstract
A processing device for processing a substrate includes a vacuum chamber including a processing space including an inner wall disposed adjacent to the processing space and an outer wall disposed on and spaced apart from the inner wall, and a plurality of heaters disposed between the inner wall and the outer wall.
Claims20
A processing device for processing a substrate comprising:
- a vacuum chamber including a processing space including an inner wall disposed adjacent to the processing space and an outer wall disposed on and spaced apart from the inner wall;
- and
- a plurality of heaters disposed between the inner wall and the outer wall.
A processing device for processing a substrate comprising:
- a vacuum chamber including a processing space defined by a first side and a second side facing each other in a first direction, a first side wall and a second side wall facing a second direction crossing the first direction, a third side wall and a fourth side wall facing a third direction crossing each of the first direction and the second direction, wherein each of the first side wall, the second side wall, the third side wall, and the fourth side wall include an inner wall disposed adjacent to the processing space and an outer wall disposed on and spaced apart from the inner wall;
- a plurality of heaters disposed between the inner wall and the outer wall;
- and
- a stage disposed between the first side and the second side in the processing space.
1 more element
A processing device for processing a substrate comprising:
- a vacuum chamber including a processing space defined by a first side and second side facing each other in a first direction and at least one side wall extending between the first side and the second side, the at least one side wall including an inner wall disposed adjacent to the processing space and an outer wall disposed on and spaced apart from the inner wall;
- and
- a plurality of heaters disposed between the inner wall and the outer wall and including a first heater disposed adjacent to the first side and a second heater disposed adjacent to the second side.
Dependencies are inferred from the claim text.