Integrated optical element and forming method of metasurface

Abstract

An integrated optical element includes a light-emitting device layer and a metasurface over the light-emitting device layer. The metasurface includes a plurality of conductive layers, a first dielectric layer and a first transparent conductive layer. The conductive layers are arranged along a first direction, in which each of the conductive layers has a plurality of holes. The first dielectric layer covers the conductive layers. The first transparent conductive layer covers the first dielectric layer.

Dependencies are inferred from the claim text.