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US 2025/0169222 A1Published application
Plasmonic field-enhanced photodetector and image sensor
OwnerHoon KIMinventor
Life of this patent
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Abstract
A plasmonic field-enhanced photodetector is disclosed. The photodetector may generate photocurrent by absorbing surface plasmon polaritons (SPPs) generated by combining surface plasmons (SPs) with photons of a light wave.
Claims20
A photodetector comprising:
- a metal layer that shields incident light and generates surface plasmon polaritons (SPPs);
- a dielectric material formed at nanoholes in which at least a part of the metal surface is opened,
- wherein photons of the incident light interact with surface plasmons (SPs) generated at an interface with the metal layer and the dielectric material to generate SPPs, and
- wherein a wavelength of the light is compressed to increase energy when the SPs is converted to the SPPs.
1 more element
An image sensor comprising:
- a metal surface;
- a metal nanohole array formed on the metal surface;
- and
- a detector array formed at a position corresponding to the metal nanohole array,
- wherein the metal surface is configured to shield incident light and to generate surface plasmon polaritons (SPPs),
- wherein the detector array comprises a dielectric formed at nanoholes in which at least a part of the metal surface is opened, and
- wherein photons of the incident light interact with surface plasmons (SPs) generated at an interface with the metal surface and the dielectric to generate SPPs.
4 more elements
A method of operating a photodetector, the method comprising:
- generating, at a metal layer that shields incident light, surface plasmon polaritons (SPPs), the SPPs being generated by combining surface plasmons (SPs) with photons of a light wave;
- and
- generating photocurrent, at a semiconductor layer, by using the absorbed SPPs,
- wherein photons of the shielded incident light interact with surface plasmons (SPs) generated at an interface with the metal layer and a dielectric material formed at nanoholes in which at least a part of the metal layer is opened.
1 more element
Dependencies are inferred from the claim text.