Semiconductor structure and manufacturing method therefor
AssigneeCXMT Corporation
InventorXiaojie LI
Life of this patent
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AssigneeCXMT Corporation
InventorXiaojie LI
Estimating the term…
The semiconductor structure includes: a base; a patterned stacked structure located on the base, including a first dielectric layer and a first conductive layer that are alternately stacked; and a staircase structure located on the base, including multiple stair layer groups that are stacked, where the multiple stair layer groups form multiple stairs distributed in a second direction, the stair layer group includes a second dielectric layer, a second conductive layer, and a third dielectric layer, in the same stair layer group, the third dielectric layer and the second conductive layer are arranged in the second direction and orthographic projections of the third dielectric layer and the second conductive layer on the base overlap an orthographic projection of the second dielectric layer on the base, and the multiple second conductive layers in the multiple stair layer groups have the same orthographic projection area on the base.
A semiconductor structure, comprising:
A manufacturing method for a semiconductor structure, comprising:
Dependencies are inferred from the claim text.