Resonator
AssigneeTXC Corporation
InventorsZong-De Lin, Tzu-Hsiu Peng
Life of this patent
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Abstract
A resonator including a vibration plate, a first electrode, and a second electrode is provided. The vibration plate has a first surface and a second surface opposite to the first surface. The first electrode is disposed on the first surface, and the second electrode is disposed on the second surface. At least one of the first electrode and the second electrode has a plurality of openings. The openings are pairwise distributed. Each pair of openings are symmetrically distributed with respect to a geometric center of an electrode which the openings belong to. All the openings do not contact with an edge of the electrode which the openings belong to.
Claims15
A resonator comprising:
- a vibration plate having a first surface and a second surface opposite to each other;
- a first electrode disposed on the first surface;
- and
- a second electrode disposed on the second surface, wherein at least one of the first electrode and the second electrode has a plurality of openings, the openings are pairwise distributed, each pair of openings is symmetrically distributed with respect to the geometric center of an electrode to which the openings belong, and all the openings do not contact with an edge of the electrode to which the openings belong.
Dependencies are inferred from the claim text.