Match network with switchable variable capacitance
AssigneeAdvanced Energy Industries, Inc.
InventorsDenis Shaw, Masahiro Watanabe
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AssigneeAdvanced Energy Industries, Inc.
InventorsDenis Shaw, Masahiro Watanabe
Estimating the term…
A match network with switchable variable capacitance. In one embodiment, a match network includes a first variable capacitance, a second variable capacitance, and a third variable capacitance dynamically connectable in parallel with the first variable capacitance. The match network also includes a controller configured to: control at least one of the first variable capacitance and the second variable capacitance for impedance tuning for a first power pulse; place, in response to a second power pulse, the third variable capacitance to be in parallel with the first variable capacitance; and control at least the third variable capacitance for impedance tuning for the second power pulse.
A match network comprising:
A method comprising:
A non-transitory processor-readable medium comprising instructions for execution by a processor or for configuring a field programmable gate array, the instructions comprising instructions to:
Dependencies are inferred from the claim text.