Integrated circuit device

An integrated circuit device comprising:

• a first cell region, an inter-cell separation region, and a second cell region sequentially arranged on a substrate in a first horizontal direction;
• a first power line and a second power line overlapping the first cell region, the inter-cell separation region, and the second cell region in a vertical direction to the substrate and being apart from each other in a second horizontal direction crossing the first horizontal direction;
• a first power tap cell penetrating through the substrate in the vertical direction and connected to the first power line;
• a second power tap cell penetrating through the substrate in the vertical direction and connected to the second power line;
• a first dummy gate insulating line and a second dummy gate insulating line apart from each other in the first horizontal direction, with the first power tap cell and the second power tap cell therebetween, in the inter-cell separation region, and each extending in the second horizontal direction;
• and
• a dummy gate insulating bridge defining a vacuum space and connected to the first dummy gate insulating line and the second dummy gate insulating line.

An integrated circuit device comprising:

• a first cell region and a second cell region apart from each other on a substrate in a first horizontal direction and each comprising a plurality of cells;
• an inter-cell separation region arranged between the first cell region and the second cell region on the substrate and extending lengthwise in a second horizontal direction crossing the first horizontal direction;
• a plurality of gate lines extending lengthwise in the second horizontal direction in each of the plurality of cells;
• a first dummy gate insulating line and a second dummy gate insulating line extending lengthwise in the second horizontal direction in the inter-cell separation region and being apart from each other in the first horizontal direction;
• a first power line and a second power line overlapping the first cell region, the inter-cell separation region, and the second cell region in a vertical direction to the substrate and being apart from each other in the second horizontal direction;
• a first inter-dummy gate insulating structure and a second inter-dummy gate insulating structure arranged between the first dummy gate insulating line and the second dummy gate insulating line and being apart from each other in the second horizontal direction;
• a first power tap cell penetrating through the first inter-dummy gate insulating structure and the substrate in the vertical direction to the substrate and connected to the first power line;
• a first power tap cell penetrating through the second inter-dummy gate insulating structure and the substrate in the vertical direction to the substrate and connected to the second power line;
• and
• a dummy gate insulating bridge defining a vacuum space and connected to the first inter-dummy gate insulating structure, the second inter-dummy gate insulating structure, the first dummy gate insulating line, and the second dummy gate insulating line.