Semiconductor package
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChien-Hao HSU, Wei-Hsiang TU, Kuo-Chin CHANG, Kathy Wei YAN, Shin-Puu JENG
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChien-Hao HSU, Wei-Hsiang TU, Kuo-Chin CHANG, Kathy Wei YAN, Shin-Puu JENG
Estimating the term…
A semiconductor package is provided. The semiconductor package includes a semiconductor substrate, a lower interconnect structure, an upper interconnect structure, a conductive pad, and a pillar bump. The lower interconnect structure is formed over the semiconductor substrate. The lower interconnect structure includes a plurality of lower dielectric layers. The lower interconnect structure also includes a plurality of lower metal lines and a plurality of lower metal vias formed in the lower dielectric layers. The upper interconnect structure is formed over the lower interconnect structure. The conductive pad is formed over the upper interconnect structure. The pillar bump structure is in direct contact with the conductive pad. The pillar bump structure includes at least two protrusions protruding toward the conductive pad and laterally separated from each other.
A semiconductor package, comprising:
A semiconductor package, comprising:
A semiconductor package, comprising:
Dependencies are inferred from the claim text.