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US 2025/0167017 A1Published application
Multi-chamber assembly for handling removable epitaxial reaction units
AssigneeLpe S.P.A.
InventorMaurilio Meschia
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Abstract
The present invention relates to a multi-chamber assembly for the handling and storage of removable reaction units for preventive maintenance operations, where said reaction units are used in reactors for the epitaxial deposition of semiconductor films on substrates. The present invention further relates to a reactor assembly integrating an epitaxial reactor for the deposition of semiconductor films on substrates, and the multi-chamber assembly hereinbefore described.
Claims14
A multi-chamber assembly for handling of at least one removable reaction unit of an epitaxial reactor comprising:
- a first chamber comprising at least one opening adapted to receive or discharge the reaction unit from/to the epitaxial reactor;
- a second chamber, for storing one or more removable reaction units, provided with a resealable access suitable for extraction and insertion of the reaction unit by an operator or by an automated system;
- and
- a transfer device connecting the first chamber with the second chamber,
- wherein the reaction unit is suitable for epitaxial deposition of a semiconductor film on a substrate.
2 more elements
Dependencies are inferred from the claim text.