Systems and methods for reducing reflected power after a state transition

A controller for reducing reflected power associated with a high frequency (HF) radio frequency (RF) generator after a transition state, comprising:

• a processor configured to:
• control the HF RF generator to divide a state of an HF RF signal into a plurality of sub-states, wherein the plurality of sub-states include a first sub-state and a second sub-state;
• control the HF RF generator to apply a first reference high frequency value during the first sub-state and a second reference high frequency value during the second sub-state;
• apply a first set of HF offset values from the first reference high frequency value during the first sub-state;
• and
• apply a second set of HF offset values from the second reference high frequency value during the second sub-state;
• and
• a memory device coupled to the processor.

A system for reducing reflected power associated with a high frequency (HF) radio frequency (RF) generator after a transition state, comprising:

• a low frequency (LF) RF generator configured to generate an LF RF signal;
• the HF RF generator configured to generate an HF RF signal;
• a match coupled to the LF RF generator and the HF RF generator;
• and
• a controller coupled to the LF RF generator and the HF RF generator, wherein the controller is configured to:
• control the HF RF generator to divide a state of the HF RF signal into a plurality of sub-states, wherein the plurality of sub-states include a first sub-state and a second sub-state;
• control the HF RF generator to apply a first reference high frequency value during the first sub-state and a second reference high frequency value during the second sub-state;
• apply a first set of HF offset values from the first reference high frequency value during the first sub-state;
• and
• apply a second set of HF offset values from the second reference high frequency value during the second sub-state.