Sem image enhancement methods and systems

An inspection system, comprising:

• a memory storing a set of instructions;
• and
• one or more processors configured to execute the set of instructions to cause the inspection system to:
• acquire a first scanning electron microscopy (SEM) image at a first resolution;
• acquire a second SEM image at a second resolution, wherein the second resolution is lower than the first resolution;
• and
• provide an enhanced image, the enhanced image being provided by using the first SEM image as a reference to enhance the second SEM image.

A non-transitory computer readable medium that stores a set of instructions that is executable by at least one processor of an apparatus to cause the apparatus to perform operations comprising:

• acquiring a first scanning electron microscopy (SEM) image at a first resolution;
• acquiring a second SEM image at a second resolution, wherein the second resolution is lower than the first resolution;
• and
• providing an enhanced image, the enhanced image being provided by using the first SEM image as a reference to enhance the second SEM image.