Deflector for a charged particle beam apparatus, deflecting system, charged particle beam apparatus, and method of fabricating a deflector
AssigneeICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
InventorsPavel Adamec, Robert Zimmermann
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Abstract
A deflector for a charged particle beam apparatus is described. The deflector has an axis and is configured to deflect a charged particle beam in a direction perpendicular to the axis, the deflector including a plurality of flat coils including two pairs of flat coils, wherein the two pairs of flat coils are arranged on opposite sides about the axis of the deflector.
Claims20
A deflector for a charged particle beam apparatus, the deflector having an axis and being configured to deflect a charged particle beam in a direction perpendicular to the axis, the deflector comprising:
- a plurality of flat coils comprising two pairs of flat coils, wherein the two pairs of flat coils are arranged on opposite sides about the axis of the deflector.
A deflecting system for a charged particle beam apparatus, the deflecting system configured for deflecting a charged particle beam of the charged particle beam apparatus relative to an optical axis, the deflecting system comprising a plurality of deflectors, each deflector of the plurality of deflectors having an axis and being configured to deflect the charged particle beam in a direction perpendicular to the axis, each deflector comprising:
- a plurality of flat coils comprising two pairs of flat coils, wherein the two pairs of flat coils are arranged on opposite sides about the axis of the deflector.
A charged particle beam apparatus comprising a deflecting system configured for deflecting a charged particle beam of the charged particle beam apparatus relative to an optical axis, the deflecting system comprising a plurality of deflectors for the charged particle beam apparatus, each deflector of the plurality of deflectors having an axis and being configured to deflect the charged particle beam in a direction perpendicular to the axis, each deflector comprising:
- a plurality of flat coils comprising two pairs of flat coils, wherein the two pairs of flat coils are arranged on opposite sides about the axis of the deflector.
A method of fabricating a deflector for a charged particle beam apparatus, comprising:
- arranging four flat coils as two pairs of flat coils of the deflector around an axis of the deflector, wherein the two pairs of flat coils are arranged on opposite sides about the axis.
Dependencies are inferred from the claim text.