Radiation-sensitive composition and pattern forming method
AssigneeJsr Corporation
InventorsMotohiro SHIRATANI, Fumiko YONEZAWA, Takehiro NAKAYAMA, Masahiro ARAKI, Hirofumi SASAKI
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AssigneeJsr Corporation
InventorsMotohiro SHIRATANI, Fumiko YONEZAWA, Takehiro NAKAYAMA, Masahiro ARAKI, Hirofumi SASAKI
Estimating the term…
A radiation-sensitive composition includes: a first polymer comprising a structural unit (I) having an acid-dissociable group; a second polymer comprising a structural unit (i) represented by formula (f1); and a solvent. The acid-dissociable group has an iodo group. RK1 is a hydrogen atom, a fluorine atom, or the like; LY1 is a divalent hydrocarbon group having 1 to 10 carbon atoms; LY2 is —COO—* or —OCO—*, *is a bond on an Rf1 side; Rf1 is a monovalent hydrocarbon group having 1 to 10 carbon atoms or a monovalent fluorinated hydrocarbon group having 1 to 10 carbon atoms; Rf2 and Rf3 are each independently a fluorine atom or a monovalent fluorinated hydrocarbon group having 1 to 10 carbon atoms; s is an integer of 0 to 3, and when Rf1 is the monovalent hydrocarbon group having 1 to 10 carbon atoms, s is an integer of 1 to 3.
A radiation-sensitive composition, comprising:
Dependencies are inferred from the claim text.