US 2025/0164712 A1 · SELF-ALIGNED STRUCTURE AND METHOD ON INTERPOSER-BASED PIC

Abstract

Structures and methods that provide and maintain precise lateral registration between mounted optical devices and waveguides formed on an optical interposer structure use a methodology in which a same patterned mask layer is utilized to pattern a plurality of alignment features requiring alignment and the waveguide cores to which mounted devices are aligned in the formation of photonic integrated circuits. Subsequent burial and re-exposure of the patterned mask layer in subsequent processing steps maintains the feature registration provided with the use of the self-aligned layer throughout the formation of the optical interposer and the alignment structures provided thereon.

Claims20

Dependent claims

An optical subassembly comprising:

a substrate;
an electrical interconnection layer disposed on the substrate, wherein the electrical interconnection layer comprises at least a first electrical interconnection line,
wherein the at least a first electrical interconnection line is configured to be electrically coupled to a first terminal of a first device assembled on the electrical interconnection layer;
a waveguide formed on the electrical interconnection layer,
wherein the waveguide comprises a top cladding layer on a core layer on a bottom cladding layer,
wherein the top cladding layer extends toward the core layer to cover two opposite sides of the core layer and the bottom cladding layer,
wherein the core layer comprises silicon oxynitride.

4 more elements

An optical subassembly comprising

a substrate;
an electrical interconnection layer disposed on the substrate,
wherein the electrical interconnection layer comprises at least a first electrical interconnection line;
a waveguide formed on the interconnection layer,
wherein the waveguide comprises a top cladding layer disposed on a core layer, with the core layer disposed on a bottom cladding layer,
wherein the core layer is embedded at least partially in the top cladding layer,
wherein the core layer comprises silicon oxynitride;
a cavity formed on and through at least the top cladding layer,
wherein the cavity contacts the waveguide to expose a facet of the core layer,
wherein the cavity is configured to house a device coupled to the facet of the core layer,
wherein the device comprises a terminal configured to electrically couple to the at least an electrical interconnection line.

8 more elements

An optical subassembly comprising

a substrate;
an electrical interconnection layer disposed on the substrate,
wherein the electrical interconnection layer comprises at least a first electrical interconnection line;
a waveguide formed on the electrical interconnection layer,
wherein the waveguide comprises top cladding layer on a core layer on a bottom cladding layer,
wherein the top cladding layer extends toward the core layer to cover at least portions of two opposite sides of the core layer,
wherein the top cladding layer extends outward from the two opposite sides of the core layer,
wherein the core layer comprises a first optical axis configured to show a first propagation direction of optical signals in the waveguide,
wherein the core layer and the cladding layers comprise silicon oxynitride;
a cavity formed on the top cladding layer and through at least the top cladding layer, wherein the cavity is adjacent to the waveguide to expose a facet of the core layer,
one or more alignment aid elements disposed in the cavity,
wherein the one or more alignment aids are configured to assist in aligning a second optical axis of an optical or optoelectronic device assembled in the cavity with the first optical axis,
wherein the device is configured to be electrically coupled to the at least a first electrical interconnection line.

10 more elements

Dependencies are inferred from the claim text.

Facts

Application

18/895,436Filed 25 Sep 2024

Priority

12 Oct 2020

Published

22 May 2025

Term ends

Not estimatedThe source records don’t support an estimate.

Classification14 codes

G02B 6/4204
Packages, e.g. shape, construction, internal or external details: the coupling comprising intermediate optical elements, e.g. lenses, holograms
G02B 6/4234
Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g.…:…
G02B 6/4203
For coupling an active element with fibres without intermediate optical elements, e.g. fibres with plane ends, fibres with shaped ends, bundles:…
G02B 6/4228
Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g.…:…

Family

Application63/090,692Us provisional application · filed 12 Oct 2020

Application17/499,323Continuation · filed 12 Oct 2021

Application18/214,076Continuation in part · filed 26 Jun 2023

Application18/753,152Continuation · filed 25 Jun 2024

Application18/753,162Continuation · filed 25 Jun 2024

Application18/895,436Continuation

Application18/753,152Continuation in part

Application18/214,076Continuation

Application18/753,162Continuation in part

US 11,686,906 B1Related patent

US 12,222,566 B2Related patent

US 2023/0333333 A1Published application

US 2024/0345340 A1Published application

US 2025/0164712 A1This patent

From the US filing history. Foreign family members aren’t listed.

Self-aligned structure and method on interposer-based pic

Life of this patent

Self-aligned structure and method on interposer-based pic

Life of this patent

Abstract

Claims20