Optical element, method for manufacturing optical element, and optical equipment
OwnerYukinobu Okura, Tomoyuki Aoyagi +1inventors
InventorsYUKINOBU OKURA, TOMOYUKI AOYAGI, YUKIMASA SUYAMA
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Abstract
An optical element includes: a substrate; and an optical shape layer that is formed on the substrate and that has a plurality of optical shape surfaces, wherein a thickness of the optical shape layer is 10 μm or larger and 3000 μm or smaller; and the optical element is provided with a groove, and a side surface of the optical shape layer and a side surface of the substrate along each contour of the plurality of optical shape surfaces form a side wall of the groove.
Claims19
An optical element comprising:
- a substrate;
- and
- an optical shape layer that is formed on the substrate and that has a plurality of optical shape surfaces, wherein
- a thickness of the optical shape layer is 10 μm or larger and 3000 μm or smaller, and
- the optical element is provided with a groove, and a side surface of the optical shape layer and a side surface of the substrate along each contour of the plurality of optical shape surfaces form a side wall of the groove.
An optical element comprising:
- a substrate;
- and
- an optical shape layer that is formed on the substrate and that has a plurality of optical shape surfaces, wherein
- an absolute value of a ratio of a thermal expansion coefficient of the optical shape layer to a thermal expansion coefficient of the substrate is 3.0 or larger, and
- the optical element is provided with a groove, and a side surface of the optical shape layer and a side surface of the substrate along each contour of the plurality of optical shape surfaces form a side wall of the groove.
An optical element comprising:
- an opaque substrate;
- and
- an optical shape layer that is formed on the substrate and that has a plurality of optical shape surfaces, wherein
- a thermal expansion coefficient of the substrate is smaller than a thermal expansion coefficient of the optical shape layer, and
- the optical element is provided with a groove, and a side surface of the optical shape layer and a side surface of the substrate along each contour of the plurality of optical shape surfaces form a side wall of the groove.
A method for manufacturing an optical element, comprising:
- forming a film on a substrate;
- forming a groove by working the substrate and the film;
- and
- forming an optical shape surface by working the film.
Dependencies are inferred from the claim text.