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US 2025/0164654 A1Published application
Radiation window
AssigneeOxford Instruments Technologies Oy
InventorSeppo Nenonen
Life of this patent
Estimating the term…
Abstract
According to an example aspect of the present invention, there is provided an X-ray window construct comprising a structural frame comprising an aperture, covering the aperture and affixed to the structural frame, a window layer comprising two-dimensional polymer material which consists of monomers covalently joined to form two-dimensional sheets.
Claims23
An X-ray window construct comprising:
- a structural frame comprising an aperture;
- and
- covering the aperture and affixed to the structural frame, a window layer comprising two-dimensional polymer material which consists of monomers covalently joined to form two-dimensional sheets.
(canceled)
A method comprising:
- obtaining a first silicon wafer comprising a mask on a first side;
- attaching a second silicon wafer on the first side of the first silicon wafer, and
- etching one of the wafers to partially expose a window layer deposited on the opposite silicon wafer and to leave a structure defined by the mask supporting the window layer, the window layer comprising two-dimensional polymer material which consists of monomers covalently joined to form two-dimensional sheets.
(canceled)
(canceled)
A method comprising:
- obtaining a first silicon wafer comprising a silicon oxide layer thereon, the silicon oxide layer comprising a recess;
- attaching a second silicon wafer on the first silicon wafer, the second silicon wafer having a window layer deposited thereon, the window layer thereby being inserted into the recess, and
- etching through the first silicon wafer to expose the window layer, and etching through the second silicon wafer in accordance with a mask, to construct a support structure for the window layer, the window layer comprising two-dimensional polymer material which consists of monomers covalently joined to form two-dimensional sheets.
-26. (canceled)
Dependencies are inferred from the claim text.