Sensor chip, magnetic sensor having the same, and magnetic sensor manufacturing method
AssigneeTDK Corporation
InventorsIkuhito ONODERA, Osamu HARAKAWA
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AssigneeTDK Corporation
InventorsIkuhito ONODERA, Osamu HARAKAWA
Estimating the term…
To accurately perform positioning of an external magnetic body with respect to a sensor chip. After mounting of a sensor chip on a substrate, an external magnetic body is mounted on the substrate so as to overlap a magnetic layer as viewed in the Y-direction perpendicular to an element formation surface. Further, the position of the external magnetic body in the X-direction is adjusted with reference to alignment marks which are provided so as to be visually confirmable from an upper surface side of the sensor chip. Thus, in a magnetic sensor assembly, a desired positional relation can be established between the sensor chip and the external magnetic body.
A sensor chip comprising:
Dependencies are inferred from the claim text.