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US 2025/0164430 A1Published application
Gas Concentration Measuring Device And Method For Measuring Concentration Of Analyte Gas In Sample Gas
AssigneeMitsui Mining & Smelting Co., Ltd.
InventorsHaruki MATSUO, Shingo IDE
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Abstract
Provided is a gas concentration measuring device including a heat generating resistor that generates heat when electricity is supplied and a stage supporting the resistor. The resistor and the stage overlap in plan view. The stage has a plan view area S of 3.6×107 μm2 or less. The ratio of the area S to the total volume V of the heat generating resistor and the stage, S/V, ranges from 0.0010 to 10 μm−1. The device is configured to measure an oxygen gas concentration in a sample gas on the basis of the resistance of the heat generating resistor.
Claims11
A gas concentration measuring device comprising:
- a heat generating resistor that generates heat when electricity is supplied;
- and
- a stage supporting the resistor,
- the resistor and the stage overlapping in plan view,
- the stage having an area S of 3.6×107 μm2 or less in plan view,
- a ratio of the area S to the total volume V of the heat generating resistor and the stage, S/V, ranging from 0.0010 to 10 μm−1, and
- the device being configured to measure an oxygen gas concentration in a sample gas on the basis of the resistance of the heat generating resistor.
4 more elements
Dependencies are inferred from the claim text.