Back to results
US 2025/0162860 A1Published application
Methods of fabricating micro electro-mechanical systems structures
AssigneeThe University of British Columbia
InventorsChang GE, Edmond CRETU
Life of this patent
Estimating the term…
Abstract
According to at least one embodiment, methods of fabricating micro electro-mechanical systems (MEMS) structures involving lamination of an electromechanical layer to a micromechanical structure are disclosed.
Claims115
A method of fabricating a micro electro-mechanical systems (MEMS) structure, the method comprising:
- aligning a first layer of the MEMS structure with a second layer of the MEMS structure by positioning alignment posts through corresponding alignment openings in each of the first layer and the second layer;
- and
- when the alignment posts are positioned through the corresponding alignment openings, laminating the first layer to the second layer.
A method of fabricating a micro electro-mechanical systems (MEMS) structure, the method comprising:
- laminating an intermediate conductive layer of an electromechanical layer of the MEMS structure to a structural layer of a micromechanical structure of the MEMS structure, the electromechanical layer further comprising an outer conductive layer and a piezoelectric layer between the intermediate conductive layer and the outer conductive layer, the micromechanical structure further comprising a spacing layer defining a space open to the structural layer,
- wherein laminating the intermediate conductive layer to the structural layer comprises positioning an actuatable portion of the electromechanical layer across the structural layer from the space, the actuatable portion of the electromechanical layer comprising at least a portion of the intermediate conductive layer, at least a portion of the piezoelectric layer, and at least a portion of the outer conductive layer.
Dependencies are inferred from the claim text.