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US 2025/0162073 A1Published application
Processing apparatus, and manufacturing method of movable body
AssigneeNikon Corporation
InventorsMasayuki SHIRAISHI, Yosuke Tatsuzaki
Life of this patent
Estimating the term…
Abstract
A processing apparatus has: a light irradiation apparatus that includes an optical system and that processes a surface of an object by irradiating the surface of the object with processing light emitted from the optical system; a partition member that surrounds a space including an optical path between the surface of the object and an optical member that is disposed at a most object side in the optical system; a partition support apparatus that supports the partition member and that does not contact the object; and a controller.
Claims22
A processing apparatus comprising:
- a light irradiation apparatus that includes an optical system and that processes a surface of an object by irradiating the surface of the object with processing light emitted from the optical system;
- a partition member that surrounds a space including an optical path between the surface of the object and an optical member that is disposed at a most object side in the optical system;
- a partition support apparatus that supports the partition member;
- and
- a controller,
- wherein
- the partition support apparatus does not contact the object.
4 more elements
A processing method comprising:
- processing a surface of an object by irradiating the surface of the object with processing light emitted from an optical system;
- surrounding, by using a partition member, a space including an optical path between the surface of the object and an optical member that is disposed at a most object side in the optical system;
- and
- supporting the partition member by using a partition support apparatus,
- wherein
- the partition support apparatus does not contact the object.
3 more elements
Dependencies are inferred from the claim text.