US 2025/0160122 A1Published application

Display apparatus and method of manufacturing the same

AssigneeSamsung Display Co., Ltd.

InventorsKeunwoo Kim, Sangsub Kim, Bummo Sung, Kyoungseok Son, Hyuneok Shin, Sunhee Lee, Sanggun Choi, Taehyun Hong

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Abstract

Provided is a display apparatus including a substrate, a first semiconductor layer disposed on the substrate and including a first active portion, a second active portion, and a first doped portion, a first conductive layer including a first conductive pattern overlapping the first active portion, a second conductive layer including a second conductive pattern and a third conductive pattern, the second conductive pattern overlapping the first conductive pattern, and the third conductive pattern connected to the first doped portion through a first contact hole, a second semiconductor layer disposed on the second conductive layer, and including an upper-first active portion and a second doped portion, a third conductive layer including a first conductive line overlapping the upper-first active portion, and a fourth conductive layer including a fourth conductive pattern electrically connecting the third conductive pattern to the second doped portion.

Claims20

Dependent claims

A display apparatus comprising:

a substrate;
a first semiconductor layer disposed on the substrate and including a first active portion, a second active portion, and a first doped portion between the first active portion and the second active portion;
a first conductive layer disposed on the first semiconductor layer and including a first conductive pattern overlapping the first active portion;
a second conductive layer disposed on the first conductive layer and including a second conductive pattern and a third conductive pattern, the second conductive pattern overlapping the first conductive pattern, the third conductive pattern connected to the first doped portion through a first contact hole exposing a portion of the first doped portion;
a second semiconductor layer disposed on the second conductive layer and including an upper-first active portion and a second doped portion extending from the upper-first active portion;
a third conductive layer disposed on the second semiconductor layer and including a first conductive line overlapping the upper-first active portion;
and
a fourth conductive layer disposed on the third conductive layer and including a fourth conductive pattern electrically connecting the third conductive pattern to the second doped portion.

5 more elements

A method of manufacturing a display apparatus, the method comprising:

forming a first semiconductor layer over a substrate;
forming a first insulating layer on the first semiconductor layer;
forming, on the first insulating layer, a first conductive layer including a first gate electrode overlapping the first semiconductor layer, and doping the first semiconductor layer;
forming a second insulating layer on the first conductive layer;
forming a first contact hole exposing a portion of the first semiconductor layer, and heat-treating the first semiconductor layer;
forming, on the second insulating layer, a capacitor electrode overlapping the first gate electrode and a second conductive layer including a first connection electrode overlapping the first contact hole;
forming a third insulating layer on the second conductive layer;
and
forming a second semiconductor layer on the third insulating layer.

6 more elements

Dependencies are inferred from the claim text.