Semiconductor device and method of fabricating the same
AssigneeSamsung Electronics Co., Ltd.
InventorsHee Chan Song, Dohyung Kim, Dongsoo Lee, Hyeji Lee, Philjong Song, Yonghyuk Choi
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AssigneeSamsung Electronics Co., Ltd.
InventorsHee Chan Song, Dohyung Kim, Dongsoo Lee, Hyeji Lee, Philjong Song, Yonghyuk Choi
Estimating the term…
A semiconductor device includes a substrate having a first active region and a second active region, a first gate conductive pattern that extends conformally in a first recess in the first active region, and a second gate conductive pattern that at least partially fills a second recess in the second active region. The first gate conductive pattern has a first thickness in a horizontal direction on an inner lateral surface of the first recess. The second gate conductive pattern has a second thickness in the horizontal direction on an inner lateral surface of the second recess. The first thickness is less than the second thickness.
A semiconductor device, comprising:
A semiconductor device, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.