Semiconductor device and manufacturing method of semiconductor device
AssigneeFuji Electric Co., Ltd.
InventorTatsuya NAITO
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AssigneeFuji Electric Co., Ltd.
InventorTatsuya NAITO
Estimating the term…
There is provided a semiconductor device comprising: a semiconductor substrate including a first-conductivity-type drift region, a first-conductivity-type emitter region provided above the drift region inside the semiconductor substrate and having a doping concentration higher than the drift region; a second-conductivity-type base region provided between the emitter and drift regions inside the semiconductor substrate; a first-conductivity-type accumulation region provided between the base and drift regions inside the semiconductor substrate and having a doping concentration higher than the drift region; and trench portions provided from an upper surface to an inside of the semiconductor substrate and including gate and dummy trench portions. In a mesa portion sandwiched by two trench portions, one of which is the gate trench portion, a depth of the accumulation region from the upper surface reaches a range of bottom ⅛ of a depth of the gate trench portion.
A semiconductor device comprising:
Dependencies are inferred from the claim text.